Trichlorosilane

Trichlorosilane

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Name Trichlorosilane / TCS / silane trichloride / silane trichloride / silicochloroform
CAS number 10025-78-2
Chemical formula SiHCl 3

Trichlorosilane is a clear liquid with a pungent odor. When a small amount of this substance comes into contact with the skin, it causes a chemical burn, with a large amount, separation of muscle tissue from bone can occur .

It is used as a raw material for the production of silicon organic monomers. It is also used in microelectronics .

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