Trichlorosilane
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| Name | Trichlorosilane / TCS / silane trichloride / silane trichloride / silicochloroform |
| CAS number | 10025-78-2 |
| Chemical formula | SiHCl 3 |
Trichlorosilane is a clear liquid with a pungent odor. When a small amount of this substance comes into contact with the skin, it causes a chemical burn, with a large amount, separation of muscle tissue from bone can occur .
It is used as a raw material for the production of silicon organic monomers. It is also used in microelectronics .